Skip to main content

Leadership History

ASML Holding: CEO History

5 leaders · 1990 to present

Who is the CEO of ASML Holding?

Christophe Fouquet is the CEO of ASML Holding, in the role since 2024. The first chief executive was Willem Maris, from 1990.

Current CEO
Christophe Fouquet (since 2024)
First CEO
Willem Maris (1990)
Leaders documented
5
Founded
1984
NameRoleFromToYears in role
Christophe FouquetPresident, Chief Executive Officer and Chair of the Board of Management2024Present2
Peter WenninkPresident and Chief Executive Officer2013202411
Eric MeuricePresident and Chief Executive Officer200420139
Doug DunnPresident, Chief Executive Officer and Chairman of the Board199920045
Willem MarisPresident and Chief Executive Officer199019999
Who was CEO of ASML Holding before Christophe Fouquet?
Peter Wennink was CEO of ASML Holding from 2013 to 2024, before Christophe Fouquet took over in 2024.

Company Overview

ASML is the most consequential technology company most consumers have never heard of. Based in Veldhoven in the Netherlands, it is the only supplier of extreme ultraviolet lithography machines, room-sized systems that use 13.5 nanometer light, plasma generated from molten tin, and mirrors polished to near-atomic smoothness to print circuit patterns onto silicon wafers. Without them, chipmakers such as TSMC, Samsung and Intel cannot manufacture the leading-edge logic and memory used in phones, data centers and AI accelerators. ASML sold 535 systems in 2025 and reported total net sales of ~$37 billion (32.7 billion euros). The company is headquartered in Veldhoven, Netherlands.

Christophe Fouquet

President, Chief Executive Officer and Chair of the Board of Management

2024 – Present

2 years (current)

Key Decisions & Impact

Fouquet, a French national born in 1973, worked at KLA-Tencor and Applied Materials before joining ASML in 2008. He held marketing and product management roles, was executive vice president Applications from 2013 to 2018, joined the Board of Management in 2018 as executive vice president EUV, became chief business officer in 2022, and was appointed chief executive in April 2024. As chief executive he has prioritized the High-NA EXE ramp, EUV productivity through the NXE:3800E, adjacent areas such as 3D integration and advanced packaging, and applying AI internally through the Mistral AI partnership.

Legacy

Christophe Fouquet became president and chief executive on April 24, 2024, succeeding Peter Wennink and Martin van den Brink. His first two years were defined by AI-driven demand, which broadened from a narrow set of customers to a much wider base, and by tightening export controls. In 2025 ASML reported total net sales of ~$37 billion (32.7 billion euros), net income of ~$10.8 billion (9.6 billion euros) and a ~$43.8 billion (38.8 billion euro) backlog, shipped the first full-specification High-NA EXE:5200B, shipped its first advanced packaging system, and invested ~$1.47 billion (1.3 billion euros) in Mistral AI. In January 2026 he also announced changes to the Technology and IT organizations that could mean a net reduction of 1,700 positions.

Peter Wennink

President and Chief Executive Officer

2013 – 2024

11 years

Key Decisions & Impact

Completed the Cymer acquisition in 2013 to control EUV light source development, acquired Hermes Microvision in 2016 and took a 24.9 percent stake in Carl Zeiss SMT, brought EUV into high-volume manufacturing from 2017, and steered the company through the Dutch and US export control regime covering China. He stepped down on April 24, 2024 after 25 years at ASML.

Legacy

Peter Wennink joined ASML as chief financial officer in 1999 after a career at Deloitte Accountants covering semiconductor clients, and became chief executive on July 1, 2013, leading the company jointly with technology chief Martin van den Brink. Under him EUV moved from a delayed research program to the basis of every leading-edge process: the Cymer acquisition closed in 2013, production NXE:3400 systems began shipping in 2017, and the 100th EUV system shipped in 2020. Net sales grew from ~$5.88 billion (5.2 billion euros) in 2013 to ~$31.2 billion (27.6 billion euros) in 2023, his last full year, and ASML's market capitalization rose from about 38 billion dollars at the end of 2013 to about 298 billion dollars at the end of 2023.

Eric Meurice

President and Chief Executive Officer

2004 – 2013

9 years

Key Decisions & Impact

Acquired Brion Technologies in 2007 and started the holistic lithography strategy, shipped the first EUV prototype the NXE:3100 in 2010, and negotiated the 2012 Customer Co-Investment Program under which Intel, TSMC and Samsung took an aggregate 23 percent stake for ~$4.35 billion (3.85 billion euros) and committed ~$1.56 billion (1.38 billion euros) of R&D funding. He handed over to Peter Wennink on July 1, 2013 and remained chairman until March 2014.

Legacy

Eric Meurice was appointed president and chief executive effective October 1, 2004, joining from Thomson where he ran the television division. Over his tenure ASML overtook its Japanese rivals in lithography, built out the immersion product line that became the industry workhorse, and committed to EUV as the next generation. He acquired Brion Technologies in 2007, which started ASML holistic lithography strategy of combining scanners with computational lithography and metrology.

Doug Dunn

President, Chief Executive Officer and Chairman of the Board

1999 – 2004

5 years

Key Decisions & Impact

Completed the acquisition of Silicon Valley Group in 2001, brought the TWINSCAN dual-stage architecture to market in 2001, and backed immersion lithography over competing approaches, shipping the first immersion system in 2003. He stepped down on September 30, 2004.

Legacy

Doug Dunn took over as president and chief executive on April 1, 1999 and ran ASML through the dot-com boom and the sharp semiconductor downturn that followed. His tenure covered the introduction of the TWINSCAN dual-stage platform in 2001 and the completion of the Silicon Valley Group acquisition in the same year, which gave ASML manufacturing and customer support scale in the United States. ASML also shipped its first immersion machine, the TWINSCAN AT:1150i, in 2003 under his leadership.

Willem Maris

President and Chief Executive Officer

1990 – 1999

9 years

Key Decisions & Impact

Kept ASML funded and shipping through the early 1990s semiconductor downturn, commercialized the PAS 5500 platform launched in 1991, won the first large orders from Intel and IBM, and led the company into its 1995 dual listing in Amsterdam and on Nasdaq. He retired as chief executive in 1999 and died in 2011.

Legacy

Willem Maris was recruited from the Philips managerial ranks to run ASML in 1990, when the company was still loss-making and dependent on parent funding. His first task was keeping it solvent through the early 1990s downturn. Within a few years ASML had signed Intel and IBM on the PAS 5500 platform, which took the company to profitability and set up the 1995 IPO. He was also known internally for walking the factory and offices and talking to employees directly, which ASML credits as a source of its culture of openness and customer focus.

Challenges & Strategic Context

ASML sits in an unusual position: it is the only supplier of EUV lithography in a market with very few buyers, which removes competitive pressure but concentrates other risks. Export controls are the most immediate constraint. The Netherlands has blocked EUV exports to China since 2019, extended controls to advanced DUV immersion systems in 2023 and to certain metrology and inspection systems in January 2025, and the EU incorporated those Dutch controls into its own control list in November 2025. Customers in China still accounted for 29.1 percent of 2025 total net sales, down from 36.1 percent in 2024, so further tightening would bite. Customer concentration is the second risk: four customers each represented more than 10 percent of 2025 sales, and Taiwan and South Korea accounted for 25.5 percent and 25.0 percent of sales respectively, which ties results to a handful of capital expenditure decisions and to stability in two locations. Supply is the third. Carl Zeiss SMT is the sole source of ASML optics under an exclusive arrangement, and ASML states that if that relationship ended it would effectively be unable to conduct its business. Most other key suppliers also operate a small number of plants. Fourth, the company is exposed to the semiconductor capital expenditure cycle: mainstream demand outside China stayed weak through 2025 even as AI-driven leading-edge logic and DRAM investment grew. Finally, ASML has had to defend its intellectual property in court, most prominently against XTAL, and in January 2026 it announced changes to its Technology and IT organizations that could mean a net reduction of 1,700 positions.

ASML Holding CEO and Leadership FAQ

Who is Christophe Fouquet and what is his background as CEO of ASML?

Christophe Fouquet became president and chief executive officer of ASML on April 24, 2024. A French national born in 1973, he worked at KLA-Tencor and Applied Materials before joining ASML in 2008, was executive vice president Applications from 2013 to 2018, joined the Board of Management in 2018 as executive vice president EUV, and became chief business officer in 2022.

Who was Peter Wennink and what was his impact as CEO of ASML from 2013 to 2024?

Peter Wennink was ASML chief financial officer from 1999 and chief executive from July 1, 2013 until April 24, 2024. Over his tenure net sales grew from ~$5.88 billion (5.2 billion euros) in 2013 to ~$31.2 billion (27.6 billion euros) in 2023, EUV moved into high-volume manufacturing, and ASML became Europe's most valuable technology company.

Who was Martin van den Brink and why is he considered the technological father of ASML?

Martin van den Brink joined ASML in 1984 and spent four decades shaping its technology, latterly as chief technology officer and co-president alongside Peter Wennink. His work spans the PAS 5500 platform, TWINSCAN dual-stage architecture, immersion lithography and EUV. He stepped down as president on April 24, 2024.

Who was Eric Meurice and what was his tenure as CEO of ASML from 2004 to 2013?

Eric Meurice was president and chief executive from October 1, 2004 until July 1, 2013, and remained chairman until March 2014. He joined from Thomson, acquired Brion Technologies in 2007 to start the holistic lithography strategy, shipped the first EUV prototype in 2010, and negotiated the 2012 Customer Co-Investment Program with Intel, TSMC and Samsung.

Who was Willem Maris and how did he lead ASML during its 1995 IPO?

Willem Maris was recruited from Philips to run ASML in 1990 and retired as chief executive in 1999. He kept the company solvent through the early 1990s downturn, took the PAS 5500 platform to market in 1991 and won the first large orders from Intel and IBM, and led ASML into its 1995 dual listing in Amsterdam and on Nasdaq. He died in 2011.

Who was Gjalt Smit and what was his role at ASML from 1984?

Gjalt Smit was brought in as ASM Lithography managing director when the joint venture started operations on April 1, 1984, and served until 1987. He ran the company from the Philips Strijp TQ building in Eindhoven, and from the purpose-built Veldhoven site from 1985, while the team redesigned the PAS 2000 hydraulic wafer stage and brought the PAS 2500 to market.

Who is Roger Dassen and what is his role as Chief Financial Officer of ASML?

Roger Dassen has served as Executive Vice President and Chief Financial Officer of ASML since 2018 (previously Global Vice Chairman at Deloitte), managing global capital allocation, investor relations, and tax planning.

How does ASML's unique dual-leadership governance tradition operate?

ASML has historically paired a commercial or finance leader with a technology leader on the Board of Management, most visibly Peter Wennink alongside chief technology officer Martin van den Brink until April 2024. After they stepped down, Christophe Fouquet took the combined chief executive role; ASML appointed a new chief technology officer in 2025 and intends to appoint Marco Pieters to the Board of Management at the 2026 annual general meeting.

Who is the CEO of ASML?

Christophe Fouquet took over as CEO following the highly successful tenure of Peter Wennink, who guided the company through the explosive growth of the EUV era.

Related Leadership Timelines

Compare executive leadership tenures and strategic transitions

Content is for informational purposes only. Not financial advice. Data sourced from SEC filings, annual reports, and public records. See our full disclaimer and methodology.